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A grinding machine adapted for grinding surfaces of thin workpieces comprises a rotating table provided with at least a workpiece holder on which a workpiece to be ground is held, and a plurality of grinding wheels having ...
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The majority of semiconductor devices are built on silicon wafers. Manufacturing of high-quality silicon wafers involves several machining processes including grinding. This review paper discusses historical perspectives on ...
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Infeed grinding is another type of single-sided grinding machine was developed with the capability of producing better flatness parameters on silicon ground wafers. 17 This grinding method was ... Tabuchi, S., 1984. Grinding ...
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1986-04-22· A grinding machine adapted for grinding surfaces of thin workpieces comprises a rotating table provided with at least a workpiece holder on which a workpiece to be ground is held, and a plurality of g
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1987-09-15· A grinding apparatus comprising a supporting base and at least one grinding wheel assembly disposed to face to the supporting base. The supporting base includes at least one holding table and the surf
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Upon completion of first grinding, the rotary table 1 is rotated by 1/4 to move to the grinding section C and to grind all wafers 3 on the table sequentially by means of #1700 grinding wheel. ... Shuji Tabuchi Original Assignee
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